High speed MEMS manufacturing project advances to Phase II

The government's Micro-Electro-Mechanical-Systems (MEMS) consortium, which will accelerate mobile technology creation, moves a step closer to completion.

According to A*STAR, which is leading the project, MEMS technology is quintessential for the booming production of next generation mobile devices.

"The second phase of the MEMS Consortium will build on the work accomplished in Phase I to develop 3 product-oriented (PO) devices, namely, the Oscillator, Magnetometer and Energy Harvester, which are among the fastest growing MEMS devices in the next five years," said A*STAR.

The MEMS Consortium Phase II has attracted company members spanning the mobile device supply chain from system, integrated device manufacturer, foundry, assembly & test, to equipment and material companies. Current members include AAC Technologies, Robert Bosch, Lite-On Technology, Marvell Technology, Murata Electronics, GLOBALFOUNDRIES, Coventor, EV Group, SPTS, AMEC, Okmetic and Soitec.

"Phase II will focus on establishing MEMS process modules and MEMS-CMOS integration methodologies for the chosen PO devices based on IME’s advanced through-silicon-via (TSV) technology. With the devices as demonstration vehicles, Phase II also aims for developing a process design kit (PDK) for MEMS, paving the way for standardization and cost-effective MEMS solutions for high volume manufacturing," it said.